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[Analysis Case] Evaluation of the Thermal Treatment Temperature Dependence of Organic Films by TDS

You can confirm the changes in degassing due to differences in the baking temperature of the sample using TDS.

TDS can evaluate the temperature dependence of the desorption of inorganic and organic gases that are released with increasing temperature. Therefore, it is effective for assessing the degassing of samples based on the baking temperature. The results of TDS analysis after baking the resist film at 50°C and 200°C are shown. It was confirmed that the degassing peaks detected up to 200°C after "baking at 50°C" were not detected after "baking at 200°C."

• Company：一般財団法人材料科学技術振興財団　MST
• Price：Other

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